适用范围:

化学品传输设备:

主要用于半导体,太阳能等制造领域中危险性酸,碱化学品的安全传输, 紧急情况下可自动切断酸,碱液体的安全供应装置.

化学品清洗设备:

主要用于半导体,太阳能等制造领域中硅片的自动化清洗, 紧急情况下可自动切断酸,碱液体的安全供应装置.

PLC控制系统：
Function:

It’s the auto filling chemical delivery system with two tanks. One is the Process tank, another one is the Bulk tank.

The Process tank with Automatic Pressure Release function to avoid an unexpected pressure increase.

PLC control system

Application:

It’s used in CVD-Thin film Process for supply following chemical.

TEOS & Dopant(TEB,TMB,TEPO,TMP)

LOW K(OMCTS,TMCTS,4MS…)

TiN(TiCl4,TDMAT,TDEAT…)