|
Process
|
Using Gases
|
|
IMP-HI-E
|
PH3,BF3,AsH3
|
|
IMP-HI-CURRENT
|
PH3,BF3, AsH3
|
|
IMP-MED-CURRENT
|
PH3,BF3, AsH3
|
|
CVD-LP-HTO
|
CVD-LP-HTO
|
|
CVD-LP-POLY
|
SiH4
|
|
CVD-LP-POLY[INST]
|
SiH4,1%PH3/He
|
|
CVD-LP-SIN1
|
SiH2Cl2,NH3
|
|
CVD-LP-SIN2
|
SiH2Cl2,NH3
|
|
CVD-LP-TEOS
|
TEOS
|
|
CVD-AP-TEOS
|
TEOS,HF,TMP,TMB,O3
|
|
CVD-HT/POLY CIDE SIX
|
WF6,SiH4,NF3,SiH2Cl2
|
|
CVD-HI/POLY CIDE POLY
|
SiH4,1%PH3/H2,H2,HCl,SiH2Cl2
|
|
CVD-PE
|
SIH4,NH3,C2F6,N2O,25%PH3/SiH4,TEOS
|
|
CVD-PEPSG
|
SIH4,NH3,25%PH3/SiH4,N2O,CF4
|
|
CVD-PESIN
|
SIH4,NH3,25%PH3/SiH4,N2O,C2F6
|
|
CVD-PESION
|
SIH4,NH3,25%PH3/SiH4,N2O,CF4
|
|
CVD-PEUVSIN
|
SIH4,NH3,25%PH3/SiH4,N2O,CF4
|
|
CVD-SABPSG
|
TEB,TEOS,TEPO,NF3,CF4
|
|
CVD-SAUSG-SA-USG
|
O3,TEOS,C2F6,NF3
|
|
CVD-SAUSG-PE
|
SiH4,NH3,25%PH3,SIH4,N2O,CF4
|
