| Process | Using Gases |
| IMP-HI-E | PH3,BF3,AsH3 |
| IMP-HI-CURRENT | PH3,BF3, AsH3 |
| IMP-MED-CURRENT | PH3,BF3, AsH3 |
| CVD-LP-HTO | CVD-LP-HTO |
| CVD-LP-POLY | SiH4 |
| CVD-LP-POLY[INST] | SiH4,1%PH3/He |
| CVD-LP-SIN1 | SiH2Cl2,NH3 |
| CVD-LP-SIN2 | SiH2Cl2,NH3 |
| CVD-LP-TEOS | TEOS |
| CVD-AP-TEOS | TEOS,HF,TMP,TMB,O3 |
| CVD-HT/POLY CIDE SIX | WF6,SiH4,NF3,SiH2Cl2 |
| CVD-HI/POLY CIDE POLY | SiH4,1%PH3/H2,H2,HCl,SiH2Cl2 |
| CVD-PE | SIH4,NH3,C2F6,N2O,25%PH3/SiH4,TEOS |
| CVD-PEPSG | SIH4,NH3,25%PH3/SiH4,N2O,CF4 |
| CVD-PESIN | SIH4,NH3,25%PH3/SiH4,N2O,C2F6 |
| CVD-PESION | SIH4,NH3,25%PH3/SiH4,N2O,CF4 |
| CVD-PEUVSIN | SIH4,NH3,25%PH3/SiH4,N2O,CF4 |
| CVD-SABPSG | TEB,TEOS,TEPO,NF3,CF4 |
| CVD-SAUSG-SA-USG | O3,TEOS,C2F6,NF3 |
| CVD-SAUSG-PE | SiH4,NH3,25%PH3,SIH4,N2O,CF4 |
